描述
产品简要说明
PEDESTAL DISC是一款基于DISC动态调节技术的精密机械基座，专为高精度工业场景设计。其核心功能包括：
多维自适应调节：支持X/Y/Z三轴±10mm行程，重复定位精度≤2μm。
实时反馈控制：集成PID算法，响应时间<5ms，闭环带宽≥5kHz。
环境适应性：通过IP67防护等级认证，可耐受-20℃至60℃温度范围。
产品详细说明
1.技术架构与创新
DISC驱动系统：
旋转盘结构：采用碳纤维复合材料Disc转盘，表面嵌入永磁体阵列，通过电磁力实现无接触驱动。
扭矩控制：峰值扭矩≥100N·m，动态负载补偿效率≥90%。
多传感器融合：
编码器定位：激光干涉仪+旋转编码器双冗余设计，定位误差≤0.5μm。
温度补偿：内置热敏电阻网络，实时修正CTE（热膨胀系数）漂移。
2.核心功能模块
动态负载平衡：
自适应阻尼：根据负载质量（5-100kg）自动调节阻尼系数，振动抑制比≥30dB。
能量回收系统：运动过程中回收动能，能耗降低20%。
故障自检机制：
健康监测：通过振动频谱分析预测Disc转盘磨损寿命，预警准确率≥95%。
冗余切换：单轴失效时，备用Disc转盘自动接管控制。
3.行业应用适配性
半导体制造：
光刻机晶圆台基座：配合ASML EUV光刻机，实现晶圆定位精度≤1nm。
封装设备集成：支持倒装焊（Flip-Chip）工艺，对位误差≤2μm。
精密测量：
三坐标测量机（CMM）：作为运动平台，提升扫描速度30%。
显微镜载物台：支持原子力显微镜（AFM）的纳米级扫描。
技术规格:PEDESTAL DISC
参数项规格描述
定位精度X/Y/Z轴≤2μm
行程范围X/Y轴±10mm，Z轴±5mm
工作温度-20℃至60℃
防护等级IP67
Product brief description
PEDESTAL DISC is a precision mechanical base based on DISC dynamic adjustment technology,designed for high-precision industrial scenarios.Its core functions include:
Multi-dimensional adaptive adjustment:supports X/Y/Z three-axis±10mm stroke,and repeat positioning accuracy≤2μm.
Real-time feedback control:Integrated PID algorithm,response time<5ms,closed-loop bandwidth≥5kHz.
Environmental adaptability:Passed IP67 protection level certification,can tolerate temperature range of-20℃to 60℃.
Product details
1.Technical Architecture and Innovation
DISC driver system:
Rotating disc structure:A carbon fiber composite Disc turntable is built with a permanent magnet array embedded on the surface,and contactless drive is achieved through electromagnetic force.
Torque control:Peak torque≥100N·m,dynamic load compensation efficiency≥90%.
Multi-sensor fusion:
Encoder positioning:dual redundant design of laser interferometer+rotary encoder,positioning error≤0.5μm.
Temperature compensation:Built-in thermistor network to correct the CTE(thermal expansion coefficient)drift in real time.
2.Core functional modules
Dynamic load balancing:
Adaptive damping:The damping coefficient is automatically adjusted according to the load mass(5-100kg),and the vibration suppression ratio is≥30dB.
Energy recovery system:Kinetic energy is recovered during exercise,and energy consumption is reduced by 20%.
Fault self-test mechanism:
Health monitoring:Vibration spectrum analysis predicts the wear life of Disc turntables,with an early warning accuracy of≥95%.
Redundant switching:When the single-axis fails,the backup Disc turntable will automatically take over the control.
3.Industry application adaptability
Semiconductor manufacturing:
Lithography machine wafer table base:Combined with ASML EUV lithography machine,the wafer positioning accuracy is≤1nm.
Packaging equipment integration:supports flip-Chip(Flip-Chip)process,with a alignment error of≤2μm.
Precision measurement:
Three-coordinate measuring machine(CMM):As a motion platform,it improves scanning speed by 30%.
Microscope stage:Supports nanoscale scanning of atomic force microscopy(AFM).
Technical Specifications:PEDESTAL DISC
Parameters Specification Description
Positioning accuracy X/Y/Z axis≤2μm
Stroke range X/Y axis±10mm,Z axis±5mm
Operating temperature-20℃to 60℃
Protection level IP67