描述
产品简要说明
ASML 4022.488.17101是ASML为High NA EUV光刻机开发的极端环境光子计数器，专为3nm及以下先进制程设计。其核心功能包括：
单光子级灵敏度：检测下限≤0.01光子/脉冲，信噪比≥1e6。
多模态光谱分析：支持EUV（13.5nm）、深紫外（193nm）及可见光（400-700nm）三波段同步检测。
动态自校准系统：温度漂移补偿效率≥99.99%，磁场干扰抑制≥120dB。
产品详细说明
1.光子检测架构
超低温探测器阵列：
单光子雪崩二极管（SPAD）：工作温度4.2K，暗计数率≤0.1Hz/cm²。
量子效率（QE）：EUV波段≥25%，深紫外波段≥40%，可见光波段≥90%。
多模态光路设计：
分光系统：基于超晶格薄膜的波长分离效率≥99.8%。
抗反射涂层：反射率≤0.1%（13.5nm波段）。
2.智能分析算法
实时光谱解析：
波长分辨力：EUV波段≤0.01nm，深紫外波段≤0.005nm。
时间分辨力：单光子到达时间误差≤10ps。
异常信号识别：
基于深度学习的噪声过滤，误报率≤0.001%。
多模态信号关联分析，检测灵敏度提升300%。
3.极端环境适配
真空与辐射兼容性：
工作真空度：1e-8 Pa，漏率≤1e-11 Pa·m³/s。
EUV辐射耐受性：累计吸收剂量≥1e6 J/cm²，性能衰减≤5%。
热管理：
液氦循环冷却系统，探测器温控精度≤0.0001K。
热应力补偿效率≥99.9%（1e-3℃温变）。
技术规格:ASML 4022.488.17101
参数项规格描述
检测灵敏度≤0.01光子/脉冲（EUV波段）
多模态支持EUV（13.5nm）、深紫外（193nm）、可见光（400-700nm）
环境适应性温度：4.2K～80℃；磁场：<1μT；真空度：<1e-8 Pa
Product brief description
ASML 4022.488.17101 is an extreme ambient photon counter developed by ASML for High NA EUV lithography machines,designed for advanced processes 3nm and below.Its core functions include:
Single-photon level sensitivity:detection lower limit≤0.01 photon/pulse,signal-to-noise ratio≥1e6.
Multimodal spectral analysis:supports three-band synchronous detection of EUV(13.5nm),deep ultraviolet(193nm)and visible light(400-700nm).
Dynamic self-calibration system:temperature drift compensation efficiency≥99.99%,magnetic field interference suppression≥120dB.
Product details
1.Photon detection architecture
Ultra-low temperature detector array:
Single-photon avalanche diode(SPAD):operating temperature 4.2K,dark count rate≤0.1Hz/cm².
Quantum efficiency(QE):EUV band≥25%,deep ultraviolet band≥40%,and visible light band≥90%.
Multimodal optical path design:
Spectroscopic system:The wavelength separation efficiency based on superlattice film is≥99.8%.
Anti-reflective coating:reflectivity≤0.1%(13.5nm band).
2.Intelligent analysis algorithm
Real-time spectral analysis:
Wavelength resolution:EUV band≤0.01nm,deep ultraviolet band≤0.005nm.
Time resolution:The arrival time error of single photon is≤10ps.
Abnormal signal recognition:
Noise filtering based on deep learning,the false alarm rate is≤0.001%.
Multimodal signal correlation analysis,detection sensitivity is improved by 300%.
3.Extreme environment adaptation
Vacuum and radiation compatibility:
Working vacuum degree:1e-8 Pa,leakage rate≤1e-11 Pa·m³/s.
EUV radiation tolerance:cumulative absorbed dose≥1e6 J/cm²,performance attenuation≤5%.
Thermal management:
Liquid helium circulation cooling system,detector temperature control accuracy≤0.0001K.
Thermal stress compensation efficiency is≥99.9%(1e-3℃temperature change).
Technical specifications:ASML 4022.488.17101
Parameters Specification Description
Detection sensitivity≤0.01 photon/pulse(EUV band)
Multimodal support EUV(13.5nm),deep ultraviolet(193nm),visible light(400-700nm)
Environmental adaptability Temperature:4.2K~80℃;Magnetic field:<1μT;Vacuum degree:<1e-8 Pa