描述
产品简要说明
ASML 4022.470.9005 RSSB2是ASML为High NA EUV光刻机设计的高速同步束流控制器，专为5nm及以下先进制程研发。其核心功能包括：
亚飞秒级能量调制：光子束流同步精度≤100fs，能量稳定性≥99.99%。
多光束协同控制：支持4束EUV光同步叠加，功率密度均匀性≥99.8%。
动态自适应补偿：基于机器学习的光束偏移校正，响应时间≤1μs。
产品详细说明
1.硬件架构设计
射频同步系统：
超导腔体：工作频率1.3GHz，Q值≥1e6，能量损耗≤0.001dB/cm。
相位锁相环（PLL）：频率稳定性≤1e-12，相位噪声≤-140dBc/Hz 1kHz。
能量调制模块：
超快开关：响应时间≤100fs，开关损耗≤0.5dB。
热管理：氦气循环冷却系统，温控精度≤0.001℃。
2.智能控制算法
自适应同步模型：
光束偏移补偿：通过激光干涉仪实时监测，补偿效率≥99.99%。
能量动态均衡：多束光功率波动控制≤0.01%，叠加误差≤0.05nm。
故障预判系统：
射频异常检测：识别100+种谐波失真模式，预警准确率≥99%。
寿命预测：超导腔体剩余寿命误差≤2%。
3.极端环境适配
超低温运行：
工作温度：4.2K（液氦环境），温度漂移≤1mK/h。
热导率控制：腔体材料CTE≤1ppm/℃。
抗辐射设计：
EUV辐射屏蔽：吸收率≥99.99%，中子屏蔽效率≥99.999%。
单粒子效应（SEU）防护：耐受性提升至1e18 neq/cm²。
技术规格:ASML 4022.470.9005 RSSB2
参数项规格描述
同步精度≤100fs（3σ）
能量稳定性≥99.99%（10Hz-100kHz频段）
多光束协同4束EUV光同步叠加，功率密度均匀性≥99.8%
环境适应性温度：4.2K～80℃；洁净度：Class 0（ISO 0级）
Product brief description
ASML 4022.470.9005 RSSB2 is a high-speed synchronous beam current controller designed by ASML for High NA EUV lithography machines,specially developed for advanced processes 5nm and below.Its core functions include:
Subfemtosecond energy modulation:photon beam synchronization accuracy≤100fs,energy stability≥99.99%.
Multi-beam collaborative control:supports 4 EUV light synchronous superposition,with power density uniformity≥99.8%.
Dynamic adaptive compensation:beam offset correction based on machine learning,response time≤1μs.
Product details
1.Hardware architecture design
RF synchronization system:
Superconducting cavity:Operating frequency 1.3GHz,Q value≥1e6,energy loss≤0.001dB/cm.
Phase phase locked loop(PLL):frequency stability≤1e-12,phase noise≤-140dBc/Hz 1kHz.
Energy modulation module:
Ultrafast switch:Response time≤100fs,switching loss≤0.5dB.
Thermal management:Helium circulation cooling system,temperature control accuracy≤0.001℃.
2.Intelligent control algorithm
Adaptive synchronization model:
Beam offset compensation:Real-time monitoring by laser interferometer,the compensation efficiency is≥99.99%.
Energy dynamic equalization:multi-beam optical power fluctuation control is≤0.01%,superposition error is≤0.05nm.
Fault Prediction System:
RF abnormality detection:identify 100+harmonic distortion modes,with an early warning accuracy of≥99%.
Life expectation:The remaining life error of superconducting cavity is≤2%.
3.Extreme environment adaptation
Ultra-low temperature operation:
Operating temperature:4.2K(liquid helium environment),temperature drift≤1mK/h.
Thermal conductivity control:Cavity material CTE≤1ppm/℃.
Radiation-resistant design:
EUV radiation shielding:absorption rate≥99.99%,neutron shielding efficiency≥99.999%.
Single-particle effect(SEU)protection:Tolerance increased to 1e18 neq/cm².
Technical Specifications:ASML 4022.470.9005 RSSB2
Parameters Specification Description
Synchronization accuracy≤100fs(3σ)
Energy stability≥99.99%(10Hz-100kHz frequency band)
Multi-beam synchronous superposition of 4 EUV light,power density uniformity≥99.8%
Environmental adaptability Temperature:4.2K~80℃;Cleanliness:Class 0(ISO level 0)
