描述
产品简要说明
ASML 99-80266是一款专为工业自动化系统设计的PLC核心数据寄存器模块，核心功能包括：
多类型数据存储：集成通用、停电保持、特殊及文件寄存器，支持2000+点数据存储与实时读写。
高可靠性设计：通过ASML电磁兼容性认证（EMC Class 5），抗电磁干扰能力达80V/m。
变址寄存器扩展：支持V/Z寄存器对软元件编号的动态修改，提升编程灵活性。
产品详细说明
1.技术架构与创新
分布式控制架构：
多核协同处理：采用双ARM Cortex-A72（主频1.5GHz）+Xilinx Kintex UltraScale+FPGA，分别负责数据存储与逻辑运算。
硬件加速单元：内置专用数据处理模块，寄存器访问响应速度提升30%。
通信协议栈：
EtherCAT主站：支持动态从站配置，节点间同步误差≤30ns。
ASML私有协议：兼容光刻机工艺参数库（包含600+控制工艺包）的实时加载。
2.核心功能模块
数据寄存器分类：
通用数据寄存器（D0～D199）：用于实时控制参数存储，支持200点数据，PLC状态切换时数据清零。
停电保持寄存器（D200～D511）：关键参数存储，支持312点数据，断电后数据保持不变。
特殊寄存器（D8000～D8255）：监控PLC运行状态，系统初始化时自动写入默认值。
文件寄存器（D1000～D2999）：存储大量采集数据或控制参数，支持2000点数据扩展。
变址寄存器（V/Z）：
支持16位数据寄存器，用于动态修改软元件编号，提升程序复用性。
3.行业应用适配性
浸润式光刻机：
晶圆台控制：存储压电陶瓷驱动器的定位参数，精度达0.1nm。
洁净室兼容性：通过ISO 14644-1 Class 1认证，微粒捕获效率≥99.99999%。
精密制造设备：
多轴协同控制：同步管理X/Y/Z三轴运动参数，协同误差≤5nm。
温度补偿：集成热敏电阻阵列，环境温度波动补偿精度达±0.01℃。
Product brief description
ASML 99-80266 is a PLC core data register module designed for industrial automation systems.The core functions include:
Multi-type data storage:Integrated general,power outage holding,special and file registers,supporting 2000+point data storage and real-time read and write.
High reliability design:Passed ASML electromagnetic compatibility certification(EMC Class 5),with an anti-electromagnetic interference capability of up to 80V/m.
Indexed register extension:supports dynamic modification of device number by V/Z registers,improving programming flexibility.
Product details
1.Technical Architecture and Innovation
Distributed control architecture:
Multi-core collaborative processing:Dual ARM Cortex-A72(main frequency 1.5GHz)+Xilinx Kintex UltraScale+FPGA,which are respectively responsible for data storage and logical operations.
Hardware acceleration unit:built-in dedicated data processing module,register access response speed is increased by 30%.
Communication protocol stack:
EtherCAT master:supports dynamic slave configuration,and the synchronization error between nodes is≤30ns.
ASML private protocol:compatible with the real-time loading of the lithography machine process parameter library(including 600+control process packages).
2.Core functional modules
Data register classification:
General data register(D0~D199):used for real-time control parameter storage,supports 200 points of data,and clears data during PLC state switching.
Power outage hold register(D200~D511):Key parameter storage,supports 312 points of data,and the data remains unchanged after power outage.
Special registers(D8000~D8255):Monitors the PLC running status,and automatically writes the default value when the system is initialized.
File register(D1000~D2999):stores a large number of collected data or control parameters,and supports 2000-point data expansion.
Indexed register(V/Z):
Supports 16-bit data registers,which are used to dynamically modify device numbers and improve program reusability.
3.Industry application adaptability
Immersive lithography machine:
Wafer control:stores the positioning parameters of the piezoelectric ceramic driver with an accuracy of 0.1nm.
Clean room compatibility:Passed ISO 14644-1 Class 1 certification,particle capture efficiency≥99.99999%.
Precision manufacturing equipment:
Multi-axis collaborative control:synchronously manage X/Y/Z three-axis motion parameters,and the coordination error is≤5nm.
Temperature compensation:Integrated thermistor array,the ambient temperature fluctuation compensation accuracy reaches±0.01℃.
