描述
关于AMAT 0100-713040的关键信息
制造商：应用材料(AMAT)
零件类型：腔室配电板
应用：主要用于AKT 55K CVD（化学气相沉积）系统。
功能：作为“腔室配电板”，其主要作用是管理和分配CVD系统特定处理腔室内的信号、电源和数据。这对于控制沉积过程中的各种参数（例如气体流量、温度、等离子体和精确时间）至关重要。它充当CVD设备主控单元与直接位于处理腔室内部或连接到处理腔室的组件之间的接口。
背景：这些配电板是复杂的半导体和显示器制造设备中不可或缺的组件，确保沉积工艺的精确可靠运行。由于晶圆和面板加工的敏感性，它们是高精度部件。
了解化学气相沉积(CVD)系统
化学气相沉积(CVD)是一种常见的半导体制造工艺，用于将各种材料的薄膜沉积到基板（例如硅片或玻璃板）上。该工艺需要将气态前驱体引入反应室，这些前驱体在加热的基板表面发生反应并分解，形成固态薄膜。反应室分配板有助于精确控制反应室内的环境和功能，从而达到所需的薄膜性能。
Key Details about AMAT 0100-713040
Manufacturer:Applied Materials(AMAT)
Part Type:Chamber Distribution Board
Application:Primarily used in AKT 55K CVD(Chemical Vapor Deposition)systems.
Function:As a”Chamber Distribution Board,”its main role is to manage and distribute signals,power,and data within the specific processing chamber of the CVD system.This is critical for controlling various parameters during the deposition process,such as gas flow,temperature,plasma,and precise timing.It acts as an interface between the main control unit of the CVD tool and the components directly inside or connected to the processing chamber.
Context:These boards are essential components in complex semiconductor and display manufacturing equipment,ensuring the precise and reliable operation of the deposition process.They are high-precision parts due to the sensitive nature of wafer and panel processing.
Understanding CVD Systems
Chemical Vapor Deposition(CVD)is a common semiconductor fabrication process used to deposit thin films of various materials onto a substrate(like a silicon wafer or glass panel).This involves introducing gaseous precursors into a chamber,where they react and decompose on the heated substrate surface,forming a solid film.The Chamber Distribution Board helps to precisely control the environment and functions within this chamber to achieve the desired film properties.
ABB Model: GBU72 3BHE055094R0002 Model: 3BHE055094R0002 GBU72 Model: GBU72 Model: 3BHE055094R0002 Model: 3BHE031197R0001 Model: 3BHB030310R0001 Model: 73BHE055094R0002 GBU72 Model: 73BHE055094R0002 Model: GBU72 Model: ABB PCS6000 PRODUCT FAMLIY ABB 5SHY4045L0006 3BHB030310R0001 3BHE039203R0101 GVC736CE101
