描述
AMAT 0190-240070：处理器板
该组件是一块印刷电路板(PCB)，用作大型应用材料制造系统中的中央处理器或关键控制元件。“MKS”标识表明其与MKS Instruments公司有关，该公司为先进制造提供仪器、子系统和工艺控制解决方案，尤其适用于真空和气体输送应用，这些应用是半导体工艺不可或缺的一部分。
关键功能（由“处理器板”/“单板计算机”推断）：
执行控制逻辑：该板可能包含一个微处理器或微控制器，运行特定的软件和固件来控制半导体或显示器制造工艺的各个方面。
数据处理：负责处理来自传感器的数据、转换命令以及管理子系统的内部操作。
接口：提供接口（例如cPCI、通信端口），用于连接其他模块、I/O设备和应用材料设备的主控制系统。
实时控制：在半导体制造中，精确的定时和实时控制至关重要。该板卡能够以高确定性执行任务，以确保工艺精度。
系统监控：它还可以执行自我诊断并监控所连接组件的状态。
应用：
此类处理器板卡是应用材料公司高度精密制造设备的核心组件，例如：
CVD（化学气相沉积）系统：用于控制薄膜沉积过程中的气体流量、温度、等离子体和时间。
PVD（物理气相沉积）系统：用于管理溅射工艺和真空条件。
蚀刻系统：控制等离子蚀刻工艺。
计量和检测工具：处理来自各种传感器的数据，用于晶圆或面板检测。
AKT系列工具：鉴于其名称“MKS Tenta”，它通常与应用材料公司的AKT系列产品相关，该系列产品用于平板显示器制造。
AMAT 0190-240070:Processor Board
This component is a printed circuit board(PCB)that serves as a central processing unit or a critical control element within a larger Applied Materials manufacturing system.The”MKS”designation suggests a connection to MKS Instruments,a company that provides instruments,subsystems,and process control solutions for advanced manufacturing,particularly in vacuum and gas delivery applications,which are integral to semiconductor processing.
Key Functions(Inferred from”Processor Board”/”Single Board Computer”):
Execution of Control Logic:The board likely contains a microprocessor or microcontroller that runs specific software and firmware to control various aspects of the semiconductor or display manufacturing process.
Data Processing:It would be responsible for processing data from sensors,translating commands,and managing internal operations of a subsystem.
Interfacing:It provides interfaces(e.g.,cPCI,communication ports)to connect with other modules,I/O devices,and the main control system of the Applied Materials tool.
Real-time Control:In semiconductor manufacturing,precise timing and real-time control are crucial.This board would execute tasks with high determinism to ensure process accuracy.
System Monitoring:It may also perform self-diagnostics and monitor the status of connected components.
Applications:
This type of processor board is a core component within Applied Materials’highly sophisticated manufacturing equipment,such as:
CVD(Chemical Vapor Deposition)Systems:For controlling gas flows,temperature,plasma,and timing during film deposition.
PVD(Physical Vapor Deposition)Systems:Managing sputtering processes and vacuum conditions.
Etch Systems:Controlling plasma etching processes.
Metrology and Inspection Tools:Processing data from various sensors for wafer or panel inspection.
AKT Series Tools:Given the”MKS Tenta”reference,it’s often linked to Applied Materials’AKT series,which are used in flat panel display manufacturing.
ABB Model: GBU72 3BHE055094R0002 Model: 3BHE055094R0002 GBU72 Model: GBU72 Model: 3BHE055094R0002 Model: 3BHE031197R0001 Model: 3BHB030310R0001 Model: 73BHE055094R0002 GBU72 Model: 73BHE055094R0002 Model: GBU72 Model: ABB PCS6000 PRODUCT FAMLIY ABB 5SHY4045L0006 3BHB030310R0001 3BHE039203R0101 GVC736CE101
