描述
AMAT 0190-51546REV030：热离子/皮拉尼真空计
该组件是一款真空计，用于测量真空室内的压力，而真空室内的压力是半导体和显示器制造工艺的关键环节。它结合了两种真空测量技术：
热离子真空计：该真空计用于测量极高真空（低压）。其工作原理是利用加热丝电离气体分子，收集离子并测量产生的电流，该电流与压力成正比。
皮拉尼真空计：该真空计用于测量粗真空至中真空（压力高于热离子真空）。其工作原理是气体的热导率随压力变化而变化。加热丝会将热量散失到周围的气体，热量散失量（以及丝的温度或电阻）指示压力。
将这两种技术结合在一个装置（热离子/皮拉尼真空计）中，可以在单个设备中实现更大范围的压力测量。这在半导体工艺中至关重要，因为在不同的制造阶段（例如，抽气、沉积或蚀刻），腔室通常会从大气压降至超高真空。
主要特性和应用
制造商：应用材料(AMAT)
部件类型：真空计（热离子/皮拉尼组合）
测量范围：由于采用了多种技术，通常能够测量从大气压到极低真空（例如，从750 Torr到10^-9 Torr或更低）的各种压力。您提供的具体清单中提到了“750 Torr热离子/皮拉尼真空计”。
应用：对于晶圆加工和显示面板制造设备（例如，CVD、PVD、蚀刻系统）至关重要，在这些设备中，精确的真空控制对于工艺稳定性和产品质量至关重要。
功能：向控制系统提供实时压力反馈，使设备能够保持特定工艺步骤所需的正确真空度。
AMAT 0190-51546REV030:Hot Ion/Pirani Gauge
This component is a vacuum gauge designed to measure pressure within a vacuum chamber,which is a critical aspect of semiconductor and display manufacturing processes.It combines two types of vacuum measurement technologies:
Hot Ion Gauge:This part of the gauge is used for measuring very high vacuum(low pressure).It works by ionizing gas molecules with a heated filament,collecting the ions,and measuring the resulting current,which is proportional to the pressure.
Pirani Gauge:This part is used for measuring rough to medium vacuum(higher pressure than hot ion).It works on the principle that the thermal conductivity of a gas changes with its pressure.A heated wire loses heat to the surrounding gas,and the amount of heat loss(and thus the wire’s temperature or resistance)indicates the pressure.
Combining these two technologies in one unit(Hot Ion/Pirani Gauge)allows for a wider range of pressure measurement within a single device.This is essential in semiconductor processes where chambers often transition from atmospheric pressure down to ultra-high vacuum during different stages of manufacturing(e.g.,during pump-down,deposition,or etching).
Key Features and Applications
Manufacturer:Applied Materials(AMAT)
Part Type:Vacuum Gauge(Hot Ion/Pirani combination)
Measurement Range:Typically capable of measuring a wide range of pressures,often from atmosphere down to extremely low vacuum(e.g.,750 Torr down to 10^-9 Torr or lower),thanks to the combination of technologies.The specific listing you provided mentioned”750 Torr Hot Ion/Pirani Gauge.”
Application:Crucial for wafer processing and display panel manufacturing equipment(e.g.,CVD,PVD,Etch systems)where precise vacuum control is paramount for process stability and product quality.
Function:Provides real-time pressure feedback to the control system,allowing the equipment to maintain the correct vacuum levels required for specific process steps.
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