描述
产品简要说明
ASML 4022.436.23221是ASML光刻机配套的工业级电源管理电路板,专为高精度电子设备设计。其核心功能包括:
多路电源输出:支持±12V/24V/48V三组独立输出,总功率≥500W。
动态负载响应:瞬态过载能力达200%(持续10ms),输出纹波≤50mVpp。
智能监控系统:集成温度/电压/电流传感器,支持Modbus TCP协议远程控制。
产品详细说明
1.技术架构与创新
拓扑结构:
隔离设计:采用磁耦合隔离变压器,输入与输出绝缘耐压≥3kV。
拓扑选择:DC-DC转换模块基于LLC谐振架构,效率≥92%(满载)。
热管理:
热管散热:多层铜箔+热管复合散热结构,结温控制≤85℃(环境40℃)。
冗余设计:双CPU并行运算,故障切换时间<100μs。
2.工业级可靠性
环境适应性:
温度范围:-40℃至70℃(工作),-55℃至85℃(存储)。
振动测试:通过MIL-STD-810G标准,2-2000Hz频段加速度≥20g。
抗干扰能力:
EMC等级:符合IEC 61000-6-4工业环境标准。
ESD防护:HBM模型≥8kV,CDM模型≥2kV。
3.行业应用场景适配
光刻机配套:
步进台驱动:为纳米级运动平台提供±12V/50A精准电源。
激光器供电:支持KrF/ArF准分子激光器的24V/100A稳定输出。
洁净室兼容性:
无铅工艺:符合RoHS 2.0标准,焊点寿命>5000次热循环。
洁净度控制:表面颗粒污染≤0.1μm(Class 100标准)。
技术规格:ASML 4022.436.23221
参数项规格描述
输入电压AC 100-240V,50/60Hz
输出通道3路独立隔离输出(±12V/24V/48V)
最大功率500W(连续),600W(峰值10ms)
尺寸230mm×150mm×35mm
Product brief description
ASML 4022.436.23221 is an industrial-grade power management circuit board equipped with ASML lithography machines,specially designed for high-precision electronic devices.Its core functions include:
Multi-channel power output:supports three independent outputs of±12V/24V/48V,with a total power of≥500W.
Dynamic load response:Transient overload capacity reaches 200%(lasting 10ms),output ripple≤50mVpp.
Intelligent monitoring system:Integrated temperature/voltage/current sensor,supporting remote control of Modbus TCP protocol.
Product details
1.Technical Architecture and Innovation
Topology:
Isolation design:Use a magnetically coupled isolation transformer,and the input and output insulation withstand voltage≥3kV.
Topology selection:The DC-DC conversion module is based on the LLC resonance architecture,with an efficiency of≥92%(full load).
Thermal management:
Heat pipe heat dissipation:multi-layer copper foil+heat pipe composite heat dissipation structure,junction temperature control≤85℃(environment 40℃).
Redundant design:dual CPU parallel operation,failover time<100μs.
2.Industrial-grade reliability
Environmental adaptability:
Temperature range:-40℃to 70℃(operation),-55℃to 85℃(storage).
Vibration test:Passed the MIL-STD-810G standard,with acceleration≥20g in the 2-2000Hz band.
Anti-interference ability:
EMC grade:Comply with IEC 61000-6-4 industrial environment standard.
ESD protection:HBM model≥8kV,CDM model≥2kV.
3.Adaptation of industry application scenarios
Lithography machine supporting:
Stepper table drive:Provides±12V/50A precise power supply for nano-level motion platforms.
Laser power supply:supports the stable output of 24V/100A of KrF/ArF excimer lasers.
Cleanroom compatibility:
Lead-free process:Comply with RoHS 2.0 standard,solder joint life>5000 thermal cycles.
Cleanliness control:Surface particle pollution≤0.1μm(Class 100 standard).
Technical specifications:ASML 4022.436.23221
Parameters Specification Description
Input voltage AC 100-240V,50/60Hz
Output channel 3 independent isolated outputs(±12V/24V/48V)
Maximum power:500W(continuous),600W(peak 10ms)
Dimensions 230mm×150mm×35mm