描述
产品简要说明
ASML 4022.436.7714是ASML浸润式光刻机的核心光学组件，专为193nm ArF浸润式光刻工艺设计。其核心功能包括：
纳米级透镜校准：支持单透镜位移精度≤0.5nm（RMS），波前畸变≤0.01λ（RMS）。
抗污染设计：表面疏水涂层，液体残留量≤0.1μm²，兼容纯水环境。
动态对准技术：实时补偿晶圆与光学路径偏差，套刻误差（Overlay）≤2nm。
产品详细说明
1.光学架构与材料特性
多层透镜系统：
氟化钙（CaF₂）透镜：透光率≥95%（193nm波段），热膨胀系数（CTE）≤1.2ppm/℃。
自适应校准模块：嵌入式压电陶瓷驱动器，校准响应时间≤1ms。
浸润液管理：
微流控通道：纯水循环流速0.5-2L/min，温度控制精度±0.01℃。
抗污染涂层：疏水纳米颗粒（SiO₂/TiO₂复合结构），接触角≥150°。
2.环境适应性优化
洁净度控制：
Class 1洁净室兼容：表面颗粒污染≤0.1ppm（0.1μm粒径）。
惰性气体密封：腔体内部氮气氛围，氧浓度≤1ppm。
振动抑制：
主动隔振系统：外部振动传递率≤0.05%（1-1000Hz频段）。
3.智能校准与维护
闭环校准算法：
激光干涉仪集成：实时监测透镜位移，校准精度≤0.1nm。
自适应补偿模型：基于机器学习的动态误差修正，良率提升≥3%。
预测性维护：
透镜磨损监测：通过光强衰减曲线分析，寿命预测误差≤5%。
技术规格:ASML 4022.436.7714
参数项规格描述
透镜数量12片（主透镜组+校准透镜组）
波长范围193±0.1nm
透光率≥95%（193nm）
环境温度25℃±0.01℃
Product brief description
ASML 4022.436.7714 is the core optical component of ASML immersion lithography machine,designed for the 193nm ArF immersion lithography process.Its core functions include:
Nano-scale lens calibration:Supports single lens displacement accuracy≤0.5nm(RMS),wavefront distortion≤0.01λ(RMS).
Anti-pollution design:surface hydrophobic coating,liquid residue≤0.1μm²,compatible with pure water environment.
Dynamic alignment technology:compensate for the deviation between wafer and optical path in real time,and the overlay error(Overlay)≤2nm.
Product details
1.Optical architecture and material properties
Multilayer lens system:
Calcium fluoride(CaF₂)lens:light transmittance≥95%(193nm band),thermal expansion coefficient(CTE)≤1.2ppm/℃.
Adaptive calibration module:embedded piezoelectric ceramic driver,calibration response time≤1ms.
Infiltration fluid management:
Microfluidic channel:pure water circulation flow rate is 0.5-2L/min,temperature control accuracy is±0.01℃.
Anti-pollution coating:hydrophobic nanoparticles(SiO₂/TiO₂composite structure),contact angle≥150°.
2.Environmental adaptability optimization
Cleanliness control:
Class 1 Clean Room Compatible:Surface Particle Contamination≤0.1ppm(0.1μm Particle Size).
Inert gas seal:nitrogen atmosphere inside the cavity,oxygen concentration≤1ppm.
Vibration suppression:
Active vibration isolation system:external vibration transmission rate≤0.05%(1-1000Hz frequency band).
3.Intelligent calibration and maintenance
Closed-loop calibration algorithm:
Laser interferometer integration:monitor lens displacement in real time,calibration accuracy≤0.1nm.
Adaptive compensation model:Dynamic error correction based on machine learning,yield improvement≥3%.
Predictive maintenance:
Lens wear monitoring:Through the analysis of light intensity attenuation curve,the life prediction error is≤5%.
Technical specifications:ASML 4022.436.7714
Parameters Specification Description
Number of lenses:12 pieces(main lens group+calibration lens group)
Wavelength range 193±0.1nm
Light transmittance≥95%(193nm)
Ambient temperature 25℃±0.01℃
