描述
产品简要说明
ASML 4022.471.84293是一款专为极紫外（EUV）光刻机设计的运动控制核心，核心功能包括：
高精度定位：支持X/Y轴±50μm行程控制，重复定位精度≤0.3nm。
实时反馈系统：集成激光干涉仪（波长633nm）与压电传感器，闭环响应时间≤50μs。
抗电磁干扰设计：通过CE认证（EN 55032 Class B），EMC抗扰度达45dB。
产品详细说明
1.技术架构与创新
分布式控制架构：
多核异步处理：采用双ARM Cortex-A53处理器（主频1GHz），独立处理运动控制与通信任务。
硬件加速引擎：内置FPGA逻辑单元，运动指令执行效率提升25%。
总线协议适配：
EtherCAT优化：支持动态从站配置，节点延迟波动≤15ns。
兼容性扩展：可通过固件升级适配Profinet IRT、CANopen FD等协议。
2.核心功能模块
运动控制算法：
插补算法库：支持直线、圆弧、螺旋线插补，轨迹跟踪误差≤0.008%。
动态补偿：集成电机齿槽效应补偿、负载惯量自适应调整模块。
安全防护机制：
冗余通信链路：双EtherCAT环网拓扑，单链路故障切换时间<3ms。
紧急制动控制：支持安全扭矩关断（STO）功能，制动响应时间≤40μs。
技术规格:ASML 4022.471.84293
参数项规格描述
支持轴数8轴脉冲/方向输出，可扩展至16轴（需外接扩展模块）
通信协议EtherCAT（主站）、Profinet IRT、CANopen FD
主站刷新周期≤150μs（EtherCAT）
工作温度-10℃至60℃（基础模式），-25℃至50℃（宽温模式）
功耗≤18W（连续运行）
Product brief description
ASML 4022.471.84293 is a motion control core designed for extreme ultraviolet(EUV)lithography machines,with core functions including:
High-precision positioning:Supports X/Y axis±50μm stroke control,repeat positioning accuracy≤0.3nm.
Real-time feedback system:Integrated laser interferometer(wavelength 633nm)and piezoelectric sensor,closed-loop response time≤50μs.
Anti-electromagnetic interference design:passed CE certification(EN 55032 Class B),EMC immunity up to 45dB.
Product details
1.Technical Architecture and Innovation
Distributed control architecture:
Multi-core asynchronous processing:adopts dual ARM Cortex-A53 processor(main frequency 1GHz)to independently handle motion control and communication tasks.
Hardware acceleration engine:built-in FPGA logic unit,and the efficiency of motion command execution is increased by 25%.
Bus protocol adaptation:
EtherCAT optimization:supports dynamic slave configuration,node delay fluctuation≤15ns.
Compatibility extension:It can be upgraded through firmware to adapt to protocols such as Profinet IRT,CANopen FD,etc.
2.Core functional modules
Motion control algorithm:
Interpolation algorithm library:supports linear,arc,and spiral interpolation,and the tracking error is≤0.008%.
Dynamic compensation:integrated motor cogging effect compensation,load inertia adaptive adjustment module.
Safety protection mechanism:
Redundant communication link:dual EtherCAT ring topology,single link failover time<3ms.
Emergency braking control:supports safe torque off(STO)function,and the braking response time is≤40μs.
Technical specifications:ASML 4022.471.84293
Parameters Specification Description
Supports number of axes:8-axis pulse/direction output,can be expanded to 16-axis(external expansion module required)
Communication protocols EtherCAT(master),Profinet IRT,CANopen FD
Main site refresh cycle≤150μs(EtherCAT)
Operating temperature-10℃to 60℃(basic mode),-25℃to 50℃(wide temperature mode)
Power consumption≤18W(continuous operation)
