描述
产品简要说明
ASML 879-0262-002是ASML专为光刻机设计的高精度快门互锁组件，核心特性包括：
亚微米级机械定位：采用磁悬浮驱动与压电陶瓷补偿技术，定位误差≤0.1μm。
多级安全互锁：支持机械、电气、软件三重冗余防护，误操作响应时间<1ms。
洁净室级可靠性：通过Class 1洁净室认证，抗静电等级ESD 8kV。
产品详细说明
1.技术架构与核心功能
机械定位系统：
由超精密滚珠丝杠（螺距误差≤0.5μm）与谐波减速器组成，实现亚微米级重复定位精度。
集成磁编码器（分辨率1nm）与闭环控制算法，动态响应时间<500μs。
互锁机制设计：
机械互锁：采用钢球卡扣结构，断电状态下仍保持物理锁定状态。
电气互锁：通过霍尔传感器与安全继电器实现通断电状态实时监测。
软件互锁：与光刻机控制系统的安全协议（如SECS/GEM）深度集成，支持紧急停止指令优先级处理。
环境适应性：
真空封装设计，内部气压<1e-3 mbar，减少空气湍流对定位精度的影响。
钛合金外壳与陶瓷轴承，热膨胀系数（CTE）匹配光刻机基座（1.2ppm/℃）。
2.性能突破
抗干扰能力：
屏蔽层采用铜-钛合金复合结构，电磁屏蔽效能达60dB（1MHz～1GHz）。
能效优化：
动态功耗管理技术，待机功耗≤5W，运行功耗≤25W。
长寿命设计：
通过加速老化测试，预计使用寿命≥10年（24/7运行）。
技术规格:ASML 879-0262-002
参数项规格描述
定位精度≤0.1μm（RMS）
互锁响应时间<1ms（机械+电气双重触发）
工作温度20℃±0.5℃（恒温控制）
真空环境内部气压<1e-3 mbar
驱动方式磁悬浮+压电陶瓷复合驱动
功耗≤25W（运行模式）
核心价值与性能亮点
1.极端环境适应性
真空环境稳定性：采用无油润滑磁悬浮轴承，避免油污污染光学元件。
低温恒温设计：内置珀尔帖温控模块，温度波动≤0.05℃，确保机械部件形变<0.05μm。
2.多场景扩展性
跨代兼容性：适配ASML NXE 3600D及后续High-NA EUV光刻机。
工业互联网集成：预留OPC UA接口，支持与MES系统实时数据交互。
3.全生命周期成本优化
自清洁功能：内置离子风清洁系统，减少人工维护频率。
模块化更换：快门组件与驱动单元可独立更换，维修成本降低50%。
Product brief description
ASML 879-0262-002 is a high-precision shutter interlock assembly designed by ASML for lithography machines.The core features include:
Submicron-level mechanical positioning:Magnetic levitation drive and piezoelectric ceramic compensation technology are used,and the positioning error is≤0.1μm.
Multi-stage safety interlocking:supports triple redundant protection for mechanical,electrical and software,and the response time for error operation is<1ms.
Clean room-level reliability:passed Class 1 clean room certification,antistatic grade ESD 8kV.
Product details
1.Technical architecture and core functions
Mechanical positioning system:
It consists of an ultra-precision ball screw(pitch error≤0.5μm)and a harmonic reducer to achieve submicron-level repeat positioning accuracy.
Integrated magnetic encoder(resolution 1nm)and closed-loop control algorithm,dynamic response time<500μs.
Interlocking mechanism design:
Mechanical interlocking:adopts a steel ball snap structure,and remains physically locked when power is off.
Electrical interlock:Real-time monitoring of on-off status through Hall sensors and safety relays.
Software interlock:In-depth integration with the safety protocols of lithography machine control systems(such as SECS/GEM)to support emergency stop instruction priority processing.
Environmental adaptability:
Vacuum package design,internal air pressure<1e-3 mbar,reduces the impact of air turbulence on positioning accuracy.
Titanium alloy shell and ceramic bearing,thermal expansion coefficient(CTE)match the base of the lithography machine(1.2ppm/℃).
2.Performance breakthrough
Anti-interference ability:
The shielding layer adopts a copper-titanium alloy composite structure,and the electromagnetic shielding effect is 60dB(1MHz~1GHz).
Energy efficiency optimization:
Dynamic power consumption management technology,standby power consumption≤5W,and running power consumption≤25W.
Long life design:
Through accelerated aging test,the estimated service life is≥10 years(operating 24/7).
Technical Specifications:ASML 879-0262-002
Parameters Specification Description
Positioning accuracy≤0.1μm(RMS)
Interlock response time<1ms(mechanical+electrical double trigger)
Working temperature:20℃±0.5℃(constant temperature control)
Vacuum environment Internal air pressure<1e-3 mbar
Drive mode Magnetic levitation+piezoelectric ceramic composite drive
Power consumption≤25W(operating mode)
Core Valuesand Performance Highlights
1.Extreme environmental adaptability
Vacuum environment stability:oil-free lubricated magnetic levitation bearings are used to avoid oil pollution from contaminating optical components.
Low temperature constant temperature design:built-in Peltier temperature control module,temperature fluctuations≤0.05℃,ensuring deformation of mechanical components<0.05μm.
2.Multi-scene scalability
Cross-generation compatibility:adapted to ASML NXE 3600D and subsequent High-NA EUV lithography machines.
Industrial Internet integration:reserves OPC UA interface and supports real-time data interaction with MES systems.
3.Full life cycle cost optimization
Self-cleaning function:built-in ion air cleaning system to reduce the frequency of manual maintenance.
Modular replacement:The shutter assembly and drive unit can be replaced independently,reducing maintenance costs by 50%.
