描述
参数项可能规格
材质304/316L不锈钢（符合SEMI F20标准，耐腐蚀性优异）
管径DN80（公称直径80mm）或3″Schedule 40（壁厚4.5mm）
工作压力0~10 bar（常温）/0~5 bar（高温200℃）（适用于工艺气体输送）
连接方式VCR®或Swagelok®接头（金属密封，泄漏率<1×10⁻⁹mbar·L/s）
表面处理电解抛光（Ra≤0.4μm）+EP（Electropolish）（减少颗粒生成，符合Class 1洁净室要求）
若为传感器/控制阀
参数项可能规格
测量范围压力：0~10 bar/温度：-50℃~+250℃（覆盖半导体工艺常见参数）
精度压力：±0.5%FS/温度：±1℃（符合SEMI E12标准）
输出信号4~20mA+RS485（Modbus RTU）（支持PLC或SCADA系统集成）
防护等级IP65（防尘防水，适用于FAB环境）
响应时间<100ms（快速反馈工艺变化
Parameters Possible Specifications
Material:304/316L stainless steel(compliant with SEMI F20 standards,excellent corrosion resistance)
Pipe Diameter:DN80(nominal diameter 80mm)or 3″Schedule 40(wall thickness 4.5mm)
Working Pressure:0-10 bar(ambient temperature)/0-5 bar(high temperature 200°C)(suitable for process gas delivery)
Connections:VCR®or Swagelok®fittings(metal-to-metal seal,leak rate<1×10⁻⁹mbar·L/s)
Surface Finish:Electropolished(Ra≤0.4μm)+EP(Electropolish)(reduces particle generation,meets Class 1 cleanroom requirements)
2.2 For Sensors/Control Valves
Parameters Possible Specifications
Measuring Range:Pressure:0-10 bar/Temperature:-50°C to+250°C(covers common semiconductor process parameters)
Accuracy:Pressure:±0.5%FS/Temperature:±1°C(compliant with SEMI E12 standards)
Output signal:4-20mA+RS485(Modbus RTU)(supports PLC or SCADA system integration)
Protection rating:IP65(dustproof and waterproof,suitable for FAB environments)
Response time:<100ms(fast feedback of process changes)
ABB Model: GBU72 3BHE055094R0002 Model: 3BHE055094R0002 GBU72 Model: GBU72 Model: 3BHE055094R0002 Model: 3BHE031197R0001 Model: 3BHB030310R0001 Model: 73BHE055094R0002 GBU72 Model: 73BHE055094R0002 Model: GBU72 Model: ABB PCS6000 PRODUCT FAMLIY ABB 5SHY4045L0006 3BHB030310R0001 3BHE039203R0101 GVC736CE101
