描述
1.产品定位与核心功能
HEIDENHAIN-799101推测为高精度绝对式直线光栅尺,属于封闭式多场景测量系统,专为高动态数控机床、半导体制造设备设计,提供纳米级分辨率与抗污染能力,支持复杂工况下的实时位移反馈与误差补偿。
2.关键技术参数推断
测量性能:
-分辨率:0.005μm(5 nm);
-系统精度:±3μm/m(全量程误差补偿);
-测量范围:单段最大3040 mm,多段拼接可达12米。
物理特性:
-封装设计:铝制外壳+双密封条(IP64防护等级,可选压缩空气升级至IP67);
-安装公差:轴向±0.2 mm,横向±0.3 mm(兼容机床导轨偏差)。
接口与通信:
-数字输出:EnDat 2.2(支持双向数据传输与诊断);
-增量信号:1 Vpp正弦波(兼容长线驱动传输)。
3.核心技术优势
动态响应
-最大跟踪速度180 m/min,适配直线电机驱动系统;
-加速度耐受:≤100 m/s²(沿测量方向)。
环境适应性
-耐污染设计:弹性密封条阻挡切屑与冷却液;
-温度补偿:内置传感器实时修正热膨胀误差。
细分技术
-电子四细分算法将原始光栅(20μm栅距)分辨率提升至5 nm。
4.典型应用场景
数控机床
-高速加工中心主轴定位(抑制热变形误差);
-磨床磨削量实时反馈(纳米级误差补偿)。
半导体设备
-晶圆传输系统定位(多轴同步控制);
-光刻机载台微米级运动校准。
1.Product positioning and core functions
HEIDENHAIN-799101 is speculated to be a high-precision absolute linear grating scale.It is a closed multi-scene measurement system.It is specially designed for high-dynamic CNC machine tools and semiconductor manufacturing equipment.It provides nano-level resolution and pollution resistance,and supports real-time displacement feedback and error compensation under complex operating conditions.
2.Inference of key technical parameters
Measurement performance:
-Resolution:0.005μm(5 nm);
-System accuracy:±3μm/m(full-range error compensation);
-Measurement range:a maximum of 3040 mm for single segments,and a multi-section splicing can reach 12 meters.
Physical characteristics:
-Packaging design:aluminum housing+double seal strips(IP64 protection level,optional compressed air upgrade to IP67);
-Installation tolerance:axial±0.2 mm,transverse±0.3 mm(compatible with machine guide rail deviation).
Interface and communication:
-Digital output:EnDat 2.2(supports two-way data transmission and diagnosis);
-Incremental signal:1 Vpp sine wave(compatible with long-line drive transmission).
3.Core technology advantages
Dynamic response
-Maximum tracking speed is 180 m/min,adapted to linear motor drive system;
-Acceleration tolerance:≤100 m/s²(along the measurement direction).
Environmental adaptability
-Contamination-resistant design:elastic sealing strips block chips and coolant;
-Temperature compensation:The built-in sensor corrects thermal expansion error in real time.
Segmentation technology
-Electronics Quadripolarization algorithm improves the resolution of the original grating(20μm grid pitch)to 5 nm.
4.Typical application scenarios
CNC machine tool
-High-speed machining center spindle positioning(suppresses thermal deformation error);
-Real-time feedback of grinding amount of grinding machine(nano-scale error compensation).
Semiconductor equipment
-Wafer transmission system positioning(multi-axis synchronization control);
-Micron-level motion calibration of lithography machine stage.