Metso Valm-818139

真空系统突破:

-金属C型密封:钼合金+电子束焊接(漏率<1×10⁻¹²Pa·m³/s);

-自净化阀腔:等离子体溅射涂层(抑制真空放气)。

驱动革新:

-磁流体轴承:零接触摩擦(寿命>2×10⁶小时);

-柔性驱动臂:形状记忆合金+碳纤维复合(形变量<0.001mm)。

安全与诊断:

-在线真空监测:质子诱发X射线荧光分析(介质纯度实时反馈);

-辐射硬化设计:钽基板电路(总剂量耐受>1Mrad)。

描述

1.产品定位与核心功能

VALM-818139推测为超高真空兼容型阀门定位器,定位半导体/航天燃料系统的零污染控制,聚焦非蒸发金属密封、磁流体轴承驱动与真空兼容算法。其核心功能包括:

控制性能:

-位置精度:±0.08%(全行程范围内,皮米级分辨率);

-响应时间:≤18ms(阶跃信号响应,真空环境优化型)。

环境适应性:

-真空兼容性:1×10⁻⁹Pa至常压无缝切换;

-腐蚀抵抗:耐发烟硝酸/液氟介质(ASTM G48-11A达标)。

2.关键技术参数

项目典型规格(参考同类产品)

输入/输出

-输入信号:4–20mA DC(支持CCSDS航天数据协议);

-输出类型:磁流体轴承+柔性铰链复合驱动;

供电要求

-电压范围:12–24V DC(卫星电池兼容);

-功耗:≤5W(峰值),休眠模式<0.01W;

通信接口

-数字总线:CAN FD、SpacePack;

-无线扩展:Ka频段抗干扰射频链路(深空通信预留)。

3.功能特性

真空系统突破:

-金属C型密封:钼合金+电子束焊接(漏率<1×10⁻¹²Pa·m³/s);

-自净化阀腔:等离子体溅射涂层(抑制真空放气)。

驱动革新:

-磁流体轴承:零接触摩擦(寿命>2×10⁶小时);

-柔性驱动臂:形状记忆合金+碳纤维复合(形变量<0.001mm)。

安全与诊断:

-在线真空监测:质子诱发X射线荧光分析(介质纯度实时反馈);

-辐射硬化设计:钽基板电路(总剂量耐受>1Mrad)。

4.典型应用场景

航天与半导体领域:

-星载推进剂阀门(液氧/液甲烷工况,防颗粒污染);

-光刻机气体配送阀(ASML兼容,耐六氟化硫腐蚀)。

科研与高端制造:

-超高真空腔室隔离阀(粒子加速器束流控制);

-航天器燃料管理阀(空间站长期驻留无泄漏)。

特殊化工:

-氟化工反应釜安全阀(耐全氟丙烯腐蚀);

-航天煤油生产纯化阀(抑制金属离子析出)。

1.Product positioning and core functions

VALM-818139 is speculated to be an ultra-high vacuum-compatible valve positioner that locates zero pollution control for semiconductor/aerospace fuel systems,focusing on non-evaporative metal seals,magnetofluid bearing drives and vacuum compatibility algorithms.Its core functions include:

Control performance:

-Position accuracy:±0.08%(within the entire stroke range,picometer-level resolution);

-Response time:≤18ms(step signal response,vacuum environment optimization type).

Environmental adaptability:

-Vacuum compatibility:1×10⁻⁹Pa to normal pressure seamless switching;

-Corrosion resistance:smoke-resistant nitric acid/liquid fluorine medium(ASTM G48-11A meets the standard).

2.Key technical parameters

Project Typical specifications(refer to similar products)

Input/Output

-Input signal:4–20mA DC(supports CCSDS aerospace data protocol);

-Output type:magnetofluid bearing+flexible hinge composite drive;

Power supply requirements

-Voltage range:12–24V DC(satellite battery compatible);

-Power consumption:≤5W(peak),sleep mode<0.01W;

Communication interface

-Digital bus:CAN FD,SpacePack;

-Wireless expansion:Ka frequency band anti-jamming radio frequency link(reserved from deep space communication).

3.Functional characteristics

Vacuum system breakthrough:

-Metal C-type seal:molybdenum alloy+electron beam welding(leakage rate<1×10⁻¹²Pa·m³/s);

-Self-purification valve chamber:plasma sputtering coating(suppresses vacuum deflation).

Drive innovation:

-Magnetic fluid bearings:zero contact friction(lifetime>2×10⁶hours);

-Flexible drive arm:shape memory alloy+carbon fiber composite(form variable<0.001mm).

Safety and Diagnosis:

-Online vacuum monitoring:proton-induced X-ray fluorescence analysis(real-time feedback on medium purity);

-Radiation hardening design:Tantalum substrate circuit(total dose tolerant>1Mrad).

4.Typical application scenarios

Aerospace and semiconductor fields:

-Starborne propellant valve(liquid oxygen/liquid methane working conditions,preventing particle pollution);

-Gas distribution valve of lithography machine(ASML compatible,resistant to sulfur hexafluoride corrosion).

Scientific research and high-end manufacturing:

-Ultra-high vacuum chamber isolation valve(particle accelerator beam flow control);

-Spacecraft fuel management valve(no leakage when staying in the space station for a long time).

Special chemicals:

-Fluorine chemical reactor safety valve(resistant to perfluoropropylene corrosion);

-Aerospace kerosene production purification valve(suppresses metal ions precipitation).