描述
1.产品定位与核心功能
VALM-818441推测为超净真空型阀门定位器，定位半导体制造、航天器燃料系统及高能物理实验装置，聚焦超高真空兼容性、微振动抑制与实时颗粒物溯源。其核心功能包括：
控制性能：
-位置精度：±0.001%（真空环境下全行程稳定）；
-响应时间：≤0.8ms（脉冲式气体截断）。
环境适应性：
-真空等级：1×10⁻¹⁰Pa·m³/s氦检漏标准；
-温度范围：-269°C（液氦）至+600°C（热真空模拟）。
2.关键技术参数
项目典型规格（参考同类产品）
输入/输出
-输入信号：HART 7.0+（支持BBMD双向通信）；
-输出类型：沉淀硬化不锈钢阀体+氮化硼阀芯（摩擦系数<0.05）；
供电要求
-电压范围：9–36V DC（宽压容错设计）；
-功耗：≤2W（峰值），休眠模式<0.001W；
通信接口
-数字总线：OPC UA PubSub（工业物联网集成）；
-无线扩展：UWB（超宽带定位，精度±1cm）。
3.功能特性
超高真空设计：
-结构特性：全金属C型密封圈（无需橡胶O型圈）；
-材料体系：6N纯铜阀座（氧含量<10ppm）。
智能监测与控制：
-集成激光散射颗粒计数器（检测粒径≥0.1μm）；
-算法支持：基于质谱的气体成分溯源（兼容ISO 14644-3标准）。
抗干扰技术：
-振动抑制：内置压电陶瓷阻尼器（衰减频率>1kHz振动）；
-电磁兼容：EN 50121-3-2（轨道交通级抗扰度）。
4.典型应用场景
半导体与微电子：
-极紫外（EUV）光刻机真空阀（防止碳氢化合物吸附）；
-化学气相沉积（CVD）前驱体控制阀（兼容WF₆等毒性气体）。
航天与深空探索：
-液氢液氧储箱排放阀（耐cryogenic热应力）；
-星载推进剂管理阀（满足NASA GRC-SP-1407标准）。
科研与能源：
-托卡马克装置等离子体燃料阀（耐中子辐照）；
-超导磁体冷却系统阀（兼容LHe/LN₂低温流体）。
1.Product positioning and core functions
VALM-818441 is speculated to be an ultra-clean vacuum valve locator,which locates semiconductor manufacturing,spacecraft fuel systems and high-energy physics experimental devices,focusing on ultra-high vacuum compatibility,micro vibration suppression and real-time particle traceability.Its core functions include:
Control performance:
-Position accuracy:±0.001%(all stroke is stable under vacuum);
-Response time:≤0.8ms(pulse gas cutoff).
Environmental adaptability:
-Vacuum level:1×10⁻¹⁰Pa·m³/s helium leakage detection standard;
-Temperature range:-269°C(liquid helium)to+600°C(thermal vacuum simulation).
2.Key technical parameters
Project Typical specifications(refer to similar products)
Input/Output
-Input signal:HART 7.0+(supports BBMD bidirectional communication);
-Output type:precipitated hardened stainless steel valve body+boron nitride valve core(coefficient of friction<0.05);
Power supply requirements
-Voltage range:9–36V DC(Wide voltage fault tolerance design);
-Power consumption:≤2W(peak),sleep mode<0.001W;
Communication interface
-Digital bus:OPC UA PubSub(Industrial Internet of Things Integration);
-Wireless expansion:UWB(ultra-wideband positioning,accuracy±1cm).
3.Functional characteristics
Ultra-high vacuum design:
-Structural characteristics:All-metal C-type sealing ring(no rubber O-ring required);
-Material system:6N pure copper valve seat(oxygen content<10ppm).
Intelligent monitoring and control:
-Integrated laser scattering particle counter(detection particle size≥0.1μm);
-Algorithm support:Mass spectrometry-based gas composition traceability(compatible with ISO 14644-3 standard).
Anti-interference technology:
-Vibration suppression:built-in piezoelectric ceramic damper(attenuation frequency>1kHz vibration);
-Electromagnetic compatibility:EN 50121-3-2(rail transit level immunity).
4.Typical application scenarios
Semiconductors and microelectronics:
-Extreme ultraviolet(EUV)lithography machine vacuum valve(prevent hydrocarbon adsorption);
-Chemical vapor deposition(CVD)precursor control valve(compatible with toxic gases such as WF₆).
Space and deep space exploration:
-Liquid hydrogen and liquid oxygen storage tank drain valve(resistant to cryogenic thermal stress);
-Starborne propellant management valve(meets NASA GRC-SP-1407 standard).
Scientific research and energy:
-Plasma fuel valve for tokamak device(resistant to neutron radiation);
-Superconducting magnet cooling system valve(compatible with LHe/LN₂low temperature fluid).
