描述
产品简要说明
ZYGO 8040-0128-01是一款专为精密光学计量设计的激光干涉仪核心组件，核心功能包括：
高精度面形测量：支持表面形貌检测精度≤0.01λ（ 633nm），透射波前像差分析误差≤0.05λ。
动态环境适应：兼容振动隔离平台（0.5-10Hz隔离效果），适用于车间环境测量。
多波长兼容性：支持可见光（633nm）及红外波段（1μm）测量，满足不同光学元件测试需求。
产品详细说明
1.技术架构与创新
模块化设计：
干涉光路集成：采用专利扩束技术，支持原生4英寸口径扩展至32英寸大孔径测量。
动态补偿机制：内置压电陶瓷驱动器（分辨率0.1nm），实时校正环境振动干扰。
通信协议栈：
EtherCAT主站：支持多轴同步测量（如X/Y/Z三轴联动），数据传输延迟<1ms。
ZYGO私有协议：兼容MetroPro软件，实现测量参数与光学元件参数库的实时匹配。
2.核心功能模块
面形检测：
相位移干涉法：通过640×480像素传感器，单次采样可获取200万个数据点。
波纹度分析：支持RMS粗糙度测量（精度达λ/300），符合ISO 10110标准。
环境适应性：
主动隔振：集成光学平台（长/宽/高2400×1500×200mm），抑制0.5-10Hz振动干扰。
温度补偿：内置热敏电阻阵列，环境温度波动补偿精度±0.01℃。
3.行业应用适配性
航空航天：
侦察窗片检测：支持轻量化反射镜（CTE≤5×10^-6/℃）的面形与透射波前分析。
高能激光耐久性测试：通过激光损伤阈值（LIDT≥5J/cm² 633nm）验证光学元件可靠性。
半导体制造：
晶圆级计量：兼容12英寸晶圆平面度检测，支持边缘遮挡区域补偿算法。
光刻机校准：与ASML光刻机工艺参数库联动，实现纳米级定位精度验证
Product brief description
ZYGO 8040-0128-01 is a laser interferometer core component designed for precision optical metrology,with core functions including:
High-precision surface shape measurement:Supports surface morphology detection accuracy≤0.01λ( 633nm),and transmittance wavefront aberration analysis error≤0.05λ.
Dynamic environment adaptation:compatible with vibration isolation platform(0.5-10Hz isolation effect),suitable for workshop environmental measurement.
Multi-wavelength compatibility:supports visible light(633nm)and infrared band(1μm)measurement,meeting different optical component testing needs.
Product details
1.Technical Architecture and Innovation
Modular design:
Interferometric optical path integration:adopts patented beam expansion technology,supporting native 4-inch diameter expansion to 32-inch large aperture measurement.
Dynamic compensation mechanism:built-in piezoelectric ceramic driver(resolution 0.1nm),correcting environmental vibration interference in real time.
Communication protocol stack:
EtherCAT master station:supports multi-axis synchronous measurement(such as X/Y/Z three-axis linkage),and the data transmission delay is<1ms.
ZYGO private protocol:compatible with MetroPro software,real-time matching of measurement parameters and optical component parameter library.
2.Core functional modules
Face shape detection:
Phase displacement interference method:Through a 640×480 pixel sensor,2 million data points can be obtained in a single sample.
Wrigility analysis:Supports RMS roughness measurement(accuracy up toλ/300),complies with ISO 10110 standards.
Environmental adaptability:
Active vibration isolation:Integrated optical platform(length/width/height 2400×1500×200mm),suppresses vibration interference from 0.5-10Hz.
Temperature compensation:Built-in thermistor array,ambient temperature fluctuation compensation accuracy±0.01℃.
3.Industry application adaptability
Aerospace:
Reconnaissance window detection:Supports surface shape and transmission wavefront analysis of lightweight reflectors(CTE≤5×10^-6/℃).
High-energy laser durability test:Verify the reliability of optical components by laser damage threshold(LIDT≥5J/cm² 633nm).
Semiconductor manufacturing:
Wafer-level metering:compatible with 12-inch wafer plane detection and supports edge occlusion area compensation algorithm.
Lithography machine calibration:linking with the ASML lithography machine process parameter library to achieve nano-level positioning accuracy verification
