描述
主要产品详情和功能
双轴测量：型号名称中的“2002”表示该板卡能够同时在两个独立轴上执行高精度位移和距离测量。这对于需要在二维（例如X和Y）方向上进行精确定位和对准的应用至关重要。
6U VME尺寸：ZMI-2002采用6U VME板卡设计。这意味着它可以装入标准6U VME（VERSAmodule Eurocard）机箱，从而可以模块化集成到现有的基于VME的控制和测量系统中。VME总线凭借其坚固的设计和高数据吞吐量，非常适合工业自动化和实时控制。
高精度和高稳定性：ZMI-2002专为高要求的精密计量而设计。它实现了亚纳米级分辨率（例如，根据干涉仪的配置，可精确到1.24纳米）。这种极高的精度和稳定性对于需要严格公差和可重复测量的应用至关重要。
干涉仪系统组件：该板并非独立的激光器或干涉仪，而是更大型ZMI系统的一部分，与以下组件协同工作：
ZMI激光头：提供高度稳定的双频激光输出（例如，兼容Zygo 7702、7714和7724激光器）。
干涉仪：光学元件，用于分束和重新组合激光束，形成干涉图样，并据此计算位移。
测量电子元件：ZMI-2002是“测量电子元件”，用于解读来自干涉仪的光信号。
数字信号处理：该板配备先进的数字信号处理器(DSP)，可快速处理干涉信号、降低噪声并实时提供高质量的测量数据。
实时位置控制：旨在提供实时位置反馈，是闭环运动控制系统的理想选择。它能够测量高速运动（例如，高达±2.55米/秒），且数据时长不确定度极低，这对于动态精度至关重要。
带时间戳的位置测量：位置测量通常带有时间戳，通过跨多个轴同步数据，进一步提高了动态精度。
兼容性和可扩展性：作为ZMI系列的一部分，它旨在与其他Zygo组件和软件无缝集成。多个ZMI板（例如2002）可以添加到VME机箱，为多轴系统提供可扩展性。
电源要求：通常需要VME背板提供+5V和+12V直流电源。
通用规格（ZMI-2002及类似系列的典型值）
制造商：ZYGO公司
产品类型：双轴位移测量板（测量电子元件）
部件号：8020-0211（常见变体，例如-1-J）
轴数：2
尺寸：6U VME
位置分辨率：通常为1.24 nm（双通干涉仪，其他ZMI板的分辨率更低）
最大速度：高达±2.55 m/s
兼容激光器：ZYGO 7702、7714、7724等
电源要求：+5V 3.5A，+12V 0.1A（典型值）
位置格式：36位，二进制补码
速度格式：32位，二进制补码
时间分辨率：25纳秒
系统同步：支持时钟输入或时钟输出，实现多轴同步。
Key Product Details and Functions
Dual-Axis Measurement:The”2002″in the model name indicates that this specific board is capable of performing high-precision displacement and distance measurements simultaneously across two independent axes.This is critical for applications where precise positioning and alignment in two dimensions(e.g.,X and Y)are required.
6U VME Form Factor:The ZMI-2002 is designed as a 6U VME board.This means it fits into a standard 6U VME(VERSAmodule Eurocard)chassis,allowing for modular integration into existing VME-based control and measurement systems.The VME bus is well-suited for industrial automation and real-time control due to its robust design and high data throughput.
High Precision and Stability:The ZMI-2002 is engineered for demanding precision metrology.It achieves sub-nanometer resolution(e.g.,as fine as 1.24 nm,depending on the interferometer configuration).This extreme accuracy and stability are essential for applications requiring tight tolerances and repeatable measurements.
Interferometer System Component:This board is not a standalone laser or interferometer.Instead,it’s part of a larger ZMI system,working in conjunction with:
ZMI Laser Head:Provides a highly stable,two-frequency laser output(e.g.,compatible with Zygo 7702,7714,and 7724 lasers).
Interferometers:Optical components that split and recombine the laser beams to create interference patterns,from which displacement is calculated.
Measurement Electronics:The ZMI-2002 is the”measurement electronics”part,interpreting the optical signals from the interferometers.
Digital Signal Processing:The board is equipped with advanced digital signal processors(DSPs)to quickly process the interference signals,reduce noise,and deliver high-quality measurement data in real time.
Real-Time Position Control:It’s designed to provide real-time position feedback,making it ideal for closed-loop motion control systems.It can measure motion at high speeds(e.g.,up to±2.55 m/s)with very low data age uncertainty,crucial for dynamic accuracy.
Time-Stamped Position Measurements:Position measurements are typically time-stamped,which further enhances dynamic accuracy by synchronizing data across multiple axes.
Compatibility and Scalability:As part of the ZMI series,it’s designed for seamless integration with other Zygo components and software.Multiple ZMI boards(like the 2002)can be added to a VME chassis to provide scalability for multi-axis systems.
Power Requirements:Typically requires+5V and+12V DC power from the VME backplane.
General Specifications(Typical for ZMI-2002 and similar series)
Manufacturer:ZYGO Corporation
Product Type:Dual-Axis Displacement Measurement Board(Measurement Electronics)
Part Number:8020-0211(often seen with variations like-1-J)
Axes:2
Form Factor:6U VME
Position Resolution:Typically 1.24 nm(for double-pass interferometers,lower with other ZMI boards)
Max Velocity:Up to±2.55 m/s
Compatible Lasers:ZYGO 7702,7714,7724,etc.
Power Requirement:+5V 3.5A,+12V 0.1A(typical)
Position Format:36-bit,2’s complement
Velocity Format:32-bit,2’s complement
Time Resolution:25 ns
System Synchronization:Supports clock in or clock out for multi-axis synchronization.
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