描述
ZYGO ZMI-4004产品详情
一、产品概述
ZYGO ZMI-4004是美国ZYGO公司生产的一款高精度激光控制板,属于ZMI™系列位移测量干涉仪的核心组件。该产品专为工业检测、光学测量及精密制造领域设计,基于氦氖激光技术,提供稳定、高精度的双频激光输出,适用于高灵敏度位置计量、表面形貌分析等场景。
二、核心功能与技术参数
激光输出特性
双频激光技术:提供高度稳定的双频激光输出,为高精度位置测量奠定基础。
氦氖激光源:波长632.8 nm,相干长度>100 m,确保测量精度与稳定性。
信号处理能力
高分辨率测量:条纹分辨率达3180条纹,支持亚纳米级精度测量。
多轴测量支持:可与ZMI 7702、7714、7724等激光器配合,实现多轴同步测量。
环境适应性
光学隔离设计:保护激光器免受系统组件背反射干扰,提升测量灵活性。
紧凑型结构:适配ZMI 240X和4X04系列测量板卡,节省安装空间。
系统兼容性
支持PLC系统:通过内置PLC操作系统实现可编程功能,便于与工业自动化系统集成。
标准接口:提供模拟量输出(如4-20 mA)及继电器输出,兼容主流工业协议(如Modbus)。
三、应用领域
精密光学制造
用于光学元件表面形貌检测、光学系统波前分析,确保元件加工精度。
半导体与微电子
支持晶圆台、光刻机等设备的位移测量,保障纳米级加工精度。
航空航天与科研
应用于高精度机械部件的形变监测、振动分析,助力关键设备性能优化。
工业计量与检测
用于平面镜、球面镜等精密器件的几何参数测量,提升生产质量控制水平。
四、产品优势
高精度与稳定性
基于氦氖激光技术,提供长期稳定的测量性能,满足工业级可靠性需求。
灵活配置与扩展性
支持多激光器协同工作,适配不同测量需求;模块化设计便于系统升级。
易用性与兼容性
内置PLC操作系统与标准接口,简化系统集成流程,降低用户开发成本。
ZYGO ZMI-4004 Product Details
I.Product Overview
ZYGO ZMI-4004 is a high-precision laser control board produced by ZYGO Corporation of the United States.It is a core component of the ZMI™series displacement measurement interferometer.This product is designed for industrial inspection,optical measurement and precision manufacturing.Based on helium-neon laser technology,it provides stable and high-precision dual-frequency laser output,which is suitable for high-sensitivity position measurement,surface morphology analysis and other scenarios.
II.Core functions and technical parameters
Laser output characteristics
Dual-frequency laser technology:provides highly stable dual-frequency laser output,laying the foundation for high-precision position measurement.
He-neon laser source:wavelength 632.8 nm,coherence length>100 m,ensuring measurement accuracy and stability.
Signal processing capabilities
High-resolution measurement:fringe resolution up to 3180 fringes,supporting sub-nanometer precision measurement.
Multi-axis measurement support:can be used with ZMI 7702,7714,7724 and other lasers to achieve multi-axis synchronous measurement.
Environmental adaptability
Optical isolation design:protects the laser from back reflection interference of system components and improves measurement flexibility.
Compact structure:compatible with ZMI 240X and 4X04 series measurement boards,saving installation space.
System compatibility
Supports PLC system:realizes programmable functions through built-in PLC operating system,which is easy to integrate with industrial automation system.
Standard interface:provides analog output(such as 4-20 mA)and relay output,compatible with mainstream industrial protocols(such as Modbus).
III.Application field
Precision optical manufacturing
Used for surface morphology detection of optical components and wavefront analysis of optical systems to ensure component processing accuracy.
Semiconductor and microelectronics
Supports displacement measurement of equipment such as wafer stages and lithography machines to ensure nano-level processing accuracy.
Aerospace and scientific research
Applied to deformation monitoring and vibration analysis of high-precision mechanical parts to help optimize the performance of key equipment.
Industrial metrology and detection
Used for geometric parameter measurement of precision devices such as plane mirrors and spherical mirrors to improve production quality control level.
4.Product Advantages
High Precision and Stability
Based on He-Ne laser technology,it provides long-term stable measurement performance and meets industrial-grade reliability requirements.
Flexible Configuration and Scalability
Supports multi-laser collaboration to adapt to different measurement requirements;modular design facilitates system upgrades.
Ease of Use and Compatibility
Built-in PLC operating system and standard interface simplify system integration process and reduce user development costs.
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